Liq Mix Cascade

General Information :

Description

Features : 

  • 3 capacities of 75 mL for liquid injection
  • Flowmeters :
  • Liq Mix part: 
    • Channel 1 Flowmeter 5 g/h
    • Channel 2 MFC 100 5000 mln/min
    • Channel 3 MFC 1 50 mln/min
    • Channel 4 MFC 10 500 mln/min
    • Channel 5 MFC 10 500 mln/min
    • Channel 6 MFC40 2000 mln/min
    • Cascadepart
    • Channel 22 MFC 1 50 mln/min
    • Channel 23 MFC 200 10000 mln/min
  • Material : Sulfinerts channels + Kalrez seals
Range:
  • T° 5 to 50°C → T° entry gas
  • Heated ooutput line = 200°C
  • Minimal entry pressure: mini 3 bars
  • Generation up to a few ppbs
    • LiqMix + Cascade : < 1 ppb

Brand : 

  • CASCADE
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